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  Published Paper Details:

  Paper Title

A Comprehensive review of Microelectromechanical Systems (MEMS)

  Authors

  Archeesha Kumar Sharma,  Prof. Dr. Reena Gunjan,  Dr. Selva Balan

  Keywords

MEMS, fabrication, monitoring,devices,etching.

  Abstract


Microelectromechanical Systems (MEMS) have become a ground-breaking technology with substantial applications in a wide range of industries, from consumer electronics to healthcare and business. The essential ideas, operating principles, and several MEMS applications are highlighted in this study. MEMS technology combines little mechanical and electrical parts to create devices that can be created at the micrometer or nanometer scale. MEMS devices are distinguished by their capacity to perceive, control, and alter minute physical processes. They integrate microelectronics with micromachining methods to build complicated systems that are lightweight, energy-efficient, and reasonably priced. MEMS are significant because they may solve difficult problems in many different sectors. MEMS accelerometers, gyroscopes, and pressure sensors have completely changed the way we interact with consumer electronics, making it possible for functions like gesture recognition, picture stabilisation, and accurate navigation. The creation of wearable devices for monitoring vital signs, medication delivery systems, and less invasive surgical instruments has been made possible in the field of healthcare thanks to MEMS-based sensors and actuators, improving patient care and treatment results. In the automobile sector, MEMS are also essential for the implementation of safety features including airbag deployment, tyre pressure monitoring, and vehicle stability control. MEMS technology has also made a substantial impact on energy harvesting systems, telecommunications, aeronautical applications, and environmental monitoring. Temperature, pressure, humidity, gas concentration, and acceleration are among the factors that MEMS sensors are used to measure and regulate. These applications have significant effects on increasing productivity, lowering expenses, and boosting overall performance. MEMS technology developments are not without difficulties, though. Technical challenges include material choice, device integration, and fabrication methods. Other ongoing problems include guaranteeing dependability, durability, and sustaining high yields throughout mass production.

  IJCRT's Publication Details

  Unique Identification Number - IJCRT23A5404

  Paper ID - 238684

  Page Number(s) - l823-l830

  Pubished in - Volume 11 | Issue 5 | May 2023

  DOI (Digital Object Identifier) -   

  Publisher Name - IJCRT | www.ijcrt.org | ISSN : 2320-2882

  E-ISSN Number - 2320-2882

  Cite this article

  Archeesha Kumar Sharma,  Prof. Dr. Reena Gunjan,  Dr. Selva Balan,   "A Comprehensive review of Microelectromechanical Systems (MEMS)", International Journal of Creative Research Thoughts (IJCRT), ISSN:2320-2882, Volume.11, Issue 5, pp.l823-l830, May 2023, Available at :http://www.ijcrt.org/papers/IJCRT23A5404.pdf

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ISSN: 2320-2882
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Journal Starting Year (ESTD) : 2013
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ISSN and 7.97 Impact Factor Details


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ISSN: 2320-2882
Impact Factor: 7.97 and ISSN APPROVED
Journal Starting Year (ESTD) : 2013
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