Published Paper Details:

MEMS has been identified as one of the most promising technologies for the 21st Century and has the potential to revolutionize both industrial and consumer products by combining silicon-based microelectronics with micromachining technology. Its techniques and micro system-based devices have the potential to dramatically affect of all of our lives and the way we live. MEMS are a process technology used to create tiny integrated devices or systems that combine mechanical and electrical components. They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from a few micrometers to millimeters. These devices have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale. The interdisciplinary nature of MEMS utilizes design, engineering and manufacturing expertise from a wide and diverse range of technical areas including integrated circuit fabrication technology, mechanical engineering, materials science, electrical engineering, chemistry and chemical engineering, as well as fluid engineering, optics, instrumentation and packaging. This report deals with the field of micro-electromechanical systems and its applications .MEMS encompass the process-based technologies used to fabricate tiny integrated devices and systems that integrate functionalities from different physical domains into one device. Such devices are fabricated using a wide range of technologies having in common the ability to create structures with micro-scale and even nano scale accuracies. The products range in size from a few microns to millimeters. These devices have the ability to sense, control and actuate on the micro scale and generate effects on the macro scale.