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INTERNATIONAL JOURNAL OF CREATIVE RESEARCH THOUGHTS - IJCRT (IJCRT.ORG)
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ISSN Approved Journal No: 2320-2882 | Impact factor: 7.97 | ESTD Year: 2013
Call For Paper - Volume 12 | Issue 5 | Month- May 2024
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Paper Title
MATERIAL SELECTION AND FABRICATION FLOW FOR MEMS ENERGY HARVESTER A STUDY
Authors
S.G. Agrahari, Dr. G.D. Agrahari, Dr. D.S. Dhote
Keywords
MEMS, energy harvester, mechanical properties, fabrication flow
Abstract
Improving the overall performance of MEMS devices is one of the key necessities. Energy harvester output comes accurate if the material chosen has mechanical properties to fulfill requirements. During analysis of devices on simulation tools input parameters include Young`s modulus, bulk modulus, shear modulus which are mechanical constants utilized. Hence, material selection based on mechanical, electrical and chemical properties is necessary. Fabrication flow is highly dependent on material selection as well as properties for material to respond to temperature, pressure, stress, strain, and performance after going through fatigue. This paper discusses material selection based on mechanical properties and fabrication flow for the same material.
IJCRT's Publication Details
Unique Identification Number - IJCRT2108287
Paper ID - 211175
Page Number(s) - c645-c649
Pubished in - Volume 9 | Issue 8 | August 2021
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Publisher Name - IJCRT | www.ijcrt.org | ISSN : 2320-2882
E-ISSN Number - 2320-2882
Cite this article
S.G. Agrahari, Dr. G.D. Agrahari, Dr. D.S. Dhote, "MATERIAL SELECTION AND FABRICATION FLOW FOR MEMS ENERGY HARVESTER A STUDY", International Journal of Creative Research Thoughts (IJCRT), ISSN:2320-2882, Volume.9, Issue 8, pp.c645-c649, August 2021, Available at :http://www.ijcrt.org/papers/IJCRT2108287.pdf
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ISSN: 2320-2882 Impact Factor: 7.97 and ISSN APPROVED Journal Starting Year (ESTD) : 2013
ISSN and 7.97 Impact Factor Details
ISSN: 2320-2882 Impact Factor: 7.97 and ISSN APPROVED Journal Starting Year (ESTD) : 2013
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