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  Published Paper Details:

  Paper Title

MICROMACHINING OF POLYMERIC BIO-MEMS WITH LASERS

  Authors

  Jai Paul Dudeja

  Keywords

excimer laser, femtosecond laser, micromachining, polymers, MEMS, Bio-MEMS

  Abstract


The development of MEMS has been driven by the need for miniaturization and lowering the overall manufacturing cost. The field of MEMS is concerned with the development of integrated systems of sensors, actuators and associated electronics. Even though the electronics industry provides an economy of scale for the silicon industry, crystalline silicon is still a complex and relatively expensive material to produce. The development of polymer micromachining technologies that complement traditional silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) applications. Polymeric Bio-MEMS (Biomedical Micro-Electro-Mechanical Systems) have great potential in their current and future applications which include genomics, proteomics, molecular diagnostics, point-of-care diagnostics, tissue engineering, single cell analysis and implantable micro-devices. The polymeric materials are very fragile and not rigid which restrict their manufacturing processes. To minimize many such problems, excimer lasers and femtosecond lasers have been used for the precise micromachining of Bio-MEMS, the details of which are discussed in this paper.

  IJCRT's Publication Details

  Unique Identification Number - IJCRT1893349

  Paper ID - 191120

  Page Number(s) - 501-510

  Pubished in - Volume 6 | Issue 4 | October 2018

  DOI (Digital Object Identifier) -    http://doi.one/10.1729/Journal.18845

  Publisher Name - IJCRT | www.ijcrt.org | ISSN : 2320-2882

  E-ISSN Number - 2320-2882

  Cite this article

  Jai Paul Dudeja,   "MICROMACHINING OF POLYMERIC BIO-MEMS WITH LASERS", International Journal of Creative Research Thoughts (IJCRT), ISSN:2320-2882, Volume.6, Issue 4, pp.501-510, October 2018, Available at :http://www.ijcrt.org/papers/IJCRT1893349.pdf

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ISSN: 2320-2882
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ISSN: 2320-2882
Impact Factor: 7.97 and ISSN APPROVED
Journal Starting Year (ESTD) : 2013
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